Nanoporous Structure in Low-Dielectric Films with Positronium Annihilation Lifetime Spectroscopy
نویسندگان
چکیده
منابع مشابه
Characterizing porosity in nanoporous thin films using positronium annihilation lifetime spectroscopy
Depth profiled positronium annihilation lifetime spectroscopy (PALS) is an extremely useful probe of the pore characteristics of nanoporous thin films in general and low-dielectric constant ðkÞ thin films in particular. PALS is sensitive to all pores (both closed and open) in the size range from 0.3 to B300 nm and to the closed-to-open pore transition. Deduced pore sizes have been extensively c...
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Depth profiled positronium annihilation lifetime spectroscopy (PALS) has been used to probe the pore characteristics (size, distribution, and interconnectivity) in thin, porous films, including silica and organic-based films. The technique is sensitive to all pores (both interconnected and closed) in the size range from 0.3 nm to 300 nm, even in films buried under a diffusion barrier. PALS may ...
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Depth-profiled positronium lifetime spectroscopy is used to probe the pore characteristics ~size, distribution, and interconnectivity! in porous, low-dielectric silica films. The technique is sensitive to the entire void volume, both interconnected and isolated, even if the film is buried beneath a metal or oxide layer. Our extension of a simple quantum mechanical model of Ps annihilation in a ...
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ژورنال
عنوان ژورنال: Chinese Physics Letters
سال: 2005
ISSN: 0256-307X,1741-3540
DOI: 10.1088/0256-307x/22/6/053